Varian HS 602 Vacuum Pump

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The Agilent Varian HS 602 Dual Stage Rotary Vane Pump is oil sealed and driven by a three phase electric motor. The pump works with force-feed lubrication, provided by an auxiliary gear-pump driven by the rotor of the vacuum pump itself. This ensures proper lubrication even when pressures are close to atmospheric. The entire pump functional block is immersed in the oil contained in the casing. The oil guarantees perfect sealing of the discharge valves, enters the pump to ensure lubrication and sealing of the parts inside, facilitates heat dissipation and reduces pump noise. The pump is equipped with a special antisuckback device which automatically isolates the vacuum system when the pump stops. This avoids rises in pressure or oil flow in the vacuum system while air is allowed back into the stator chambers. The air entering the pump after the anti-suckback device has closed prevents the oil in the casing from filling the stator chambers. The inner seals are achieved by the lubricating oil, thanks to the close machining tolerances.